(19)
(11) EP 1 328 966 A2

(12)

(88) Date of publication A3:
13.02.2003

(43) Date of publication:
23.07.2003 Bulletin 2003/30

(21) Application number: 02707964.9

(22) Date of filing: 08.03.2002
(51) International Patent Classification (IPC)7: H01L 21/00
(86) International application number:
PCT/US0207/034
(87) International publication number:
WO 0207/3660 (19.09.2002 Gazette 2002/38)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 08.03.2001 US 274532 P
06.02.2002 US 68127

(71) Applicant: ASML US, Inc.
Scotts Valley, CA 95966 (US)

(72) Inventors:
  • PORTER, Cole
    Tracy CA 95376 (US)
  • STARNER, Alan
    Orange CA 92869 (US)

(74) Representative: Stoner, Gerard Patrick et al
MEWBURN ELLISYork House23 Kingsway
London WC2B 6HP
London WC2B 6HP (GB)

   


(54) SYSTEM AND METHOD TO CONTROL RADIAL DELTA TEMPERATURE