(19)

(11)

EP 1 328 971 A2

(12)

(88) Date of publication A3: 15.05.2003 (43) Date of publication: 23.07.2003 Bulletin 2003/30 (21) Application number: 00989275.3 (22) Date of filing: 14.12.2000

(51) International Patent Classification (IPC)7: H01L 21/66 (86) International application number: PCT/US0034/086 (87) International publication number: WO 0108/0304 (25.10.2001 Gazette 2001/43)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 18.04.2000 US 198464 P 25.08.2000 US 648093 (71) Applicant: KLA-Tencor Corporation San Jose, CA 95134-1809 (US)

(72) Inventors: SATYA, Akella, V.S. Milpitas, CA 95035 (US) PINTO, Gustavo, A. Belmont, CA 94002 (US) ADLER, David, L. San Jose, CA 95120 (US) LONG, Robert, Thomas Santa Cruz, CA 95060 (US) RICHARDSON, Neil Palo Alto, CA 94301 (US) WEINER, Kurt, H. San Jose, CA 95125 (US) WALKER, David, J. Sunol, CA 94586 (US) MANTALAS, Lynda, C. Campbell, CA 95008 (US) (74) Representative: Browne, Robin Forsythe, Dr.  Urquhart-Dykes & LordTower HouseMerrion Way Leeds LS2 8PA Leeds LS2 8PA (GB)