(19)
(11) EP 1 330 665 A1

(12)

(43) Date of publication:
30.07.2003 Bulletin 2003/31

(21) Application number: 01979919.6

(22) Date of filing: 27.09.2001
(51) International Patent Classification (IPC)7G02B 1/00
(86) International application number:
PCT/US0142/407
(87) International publication number:
WO 0203/7144 (10.05.2002 Gazette 2002/19)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 31.10.2000 US 244682 P

(71) Applicant: CORNING INCORPORATED
Corning, N.Y. 14831 (US)

(72) Inventors:
  • BORRELLI, Nicholas, F.
    Elmira, NY 14905 (US)
  • DANIELSON, Paul, S.
    Corning, NY 14830 (US)
  • HESLIN, Michael, R.
    Elmira, NY 14903 (US)
  • LOGUNOV, Stephan, L.
    Corning, NY 14830 (US)
  • MOLL, Johannes
    Painted Post, NY 14870 (US)
  • SCHERMERHORN, Paul, M.
    Painted Post, NY 14870 (US)
  • SMITH, Charlene, M.
    Corning, NY 14830 (US)

(74) Representative: Poole, Michael John et al
Corning Communications Ltd.,Patent and Licensing Dpt.,Quantum House,Maylands Avenue
Hemel Hempstead, Herts. HP2 7DE
Hemel Hempstead, Herts. HP2 7DE (GB)

   


(54) OPTICAL LITHOGRAPHY AND A METHOD OF INDUCING TRANSMISSION IN OPTICAL LITHOGRAPHY PREFORMS