(19)

(11)

EP 1 330 847 A1

(12)

(43) Date of publication: 30.07.2003 Bulletin 2003/31 (21) Application number: 01920268.8 (22) Date of filing: 09.03.2001

(51) International Patent Classification (IPC)7: H01L 33/00, H01L 51/20, H05B 33/20 (86) International application number: PCT/US0107/590 (87) International publication number: WO 0203/7580 (10.05.2002 Gazette 2002/19)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 02.11.2000 US 705202 (71) Applicant: 3M Innovative Properties Company Saint Paul, MN 55133-3427 (US)	(72) Inventor: CHOU, Hsin-Hsin Saint Paul, MN 55133-3427 (US) (74) Representative: VOSSIUS & PARTNER  Siebertstrasse 4 81675 München 81675 München (DE)