A METHOD FOR MONITORING LINE WIDTH OF ELECTRONIC CIRCUIT PATTERNS - Patent 1334407

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(11)

EP 1 334 407 A2

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(88)	Date of publication A3:
	13.03.2003

(43)	Date of publication:
	13.08.2003 Bulletin 2003/33

(21)	Application number: 01996883.3

(22)	Date of filing: 14.11.2001

(51)	International Patent Classification (IPC)⁷: G03F 7/20

(86)	International application number:
	PCT/EP0113/305

(87)	International publication number:
	WO 0204/1389 (23.05.2002 Gazette 2002/21)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

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Priority:

16.11.2000 US 713240

(71)	Applicant: Koninklijke Philips Electronics N.V.
	5621 BA Eindhoven (NL)

(72)	Inventor:
	ZIGER, David, H. NL-5656 AA Eindhoven (NL)

(74)	Representative: Cobben, Louis Marie Hubert
	INTERNATIONAAL OCTROOIBUREAU B.V.,Prof. Holstlaan 6 5656 AA Eindhoven 5656 AA Eindhoven (NL)

(54)	A METHOD FOR MONITORING LINE WIDTH OF ELECTRONIC CIRCUIT PATTERNS