| (84) |
Designated Contracting States: |
|
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
01.11.2000 US 704972
01.11.2000 US 704867
|
| (71) |
Applicant: Applied Materials, Inc. |
|
Santa Clara,California 95052 (US) |
|
| (72) |
Inventors: |
|
- CARDUCCI, James, D.
Sunnyvale, CA 94086 (US)
- NOORBAKHSH, Hamid
Fremont, CA 95439 (US)
- LEE, Evans, Y.
Milpitas, CA 95035 (US)
- PU, Bryan, Y.
San Jose, CA 95135 (US)
- SHAN, Hongqing
Cupertino, CA 95014 (US)
- BJORKMAN, Claes
Mountain View, CA 94041 (US)
- SALIMIAN, Siamak
Sunnyvale, CA 94087 (US)
- LUSCHER, Paul, E.
Sunnyvale, CA 94087 (US)
- WELCH, Michael, D.
Pleasanton, CA 94566 (US)
- LIU, Jingbao
Sunnyvale, CA 94087 (US)
- KOMATSU, Takehiko
Santa Clara, CA 95054 (US)
- DOAN, Kenny, L.
San Jose, CA 95131 (US)
- CHANG, Melody
Union City, CA 94587 (US)
- WANG, Zhuxu
Cupertino, CA 95014 (US)
- KIM, Yunsang
San Jose, CA 95050 (US)
- WANG, Ruiping
Fremont, CA 94539 (US)
|
| (74) |
Representative: Zimmermann, Gerd Heinrich et al |
|
Zimmermann & Partner,Postfach 33 09 20
80069 München
80069 München (DE) |
|
