(19)
(11) EP 1 336 205 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
08.06.2005 Bulletin 2005/23

(45) Mention of the grant of the patent:
13.04.2005 Bulletin 2005/15

(21) Application number: 01997856.8

(22) Date of filing: 22.11.2001
(51) International Patent Classification (IPC)7: H01L 41/09
(86) International application number:
PCT/EP2001/013632
(87) International publication number:
WO 2002/043162 (30.05.2002 Gazette 2002/22)

(54)

INERTIAL ROTATION DEVICE

INERTIAL-ROTATIONSELEMENT

DISPOSITIF DE ROTATION INERTIELLE

(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 23.11.2000 GB 0028511

(43) Date of publication of application:
20.08.2003 Bulletin 2003/34

(73) Proprietor: attocube Systems AG
80331 München (DE)

(72) Inventors:
  • Karrai, Khaled, Dr.
    80337 München (DE)
  • Haines, Miles, Dr.
    Bishop's Waltham Hants S032 1RS (GB)

(74) Representative: Lange, Thomas, Dr. 
Patentanwälte Lambsdorff & Lange, Dingolfinger Strasse 6
81673 München
81673 München (DE)


(56) References cited: : 
WO-A-00/54004
   
  • ENG L M ET AL: "Inexpensive, reliable control electronics for stick-slip motion in air and ultrahigh vacuum" REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 67, no. 2, February 1996 (1996-02), pages 401-405, XP002197710 ISSN: 0034-6748
  • ZESCH W ET AL: "Inertial drives for micro- and nano-robots: two novel mechanisms" MICROROBOTICS AND MICROMECHANICAL SYSTEMS, PHILADELPHIA, PA, USA, vol. 2593, 1995, pages 80-88, XP000602747 Proceedings of the SPIE - The International Society for Optical Engineering ISSN: 0277-786X
  • YAKIMOV V N: "Scanning tunneling microscope with a rotary piezoelectric stepping motor" REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 67, no. 2, February 1996 (1996-02), pages 384-386, XP000584517 ISSN: 0034-6748
  • PATENT ABSTRACTS OF JAPAN vol. 018, no. 667 (E-1645), 15 December 1994 (1994-12-15) & JP 06 261559 A (MINOLTA CAMERA CO LTD), 16 September 1994 (1994-09-16) -& JP 06 261559 A (MINOLTA CAMERA CO LTD) 16 September 1994 (1994-09-16)
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).