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(11)

EP 1 338 028 A1

(12)

(43) Date of publication: 27.08.2003 Bulletin 2003/35 (21) Application number: 00982323.8 (22) Date of filing: 01.12.2000

(51) International Patent Classification (IPC)7: H01L 21/00 (86) International application number: PCT/US0032/655 (87) International publication number: WO 0301/2830 (13.02.2003 Gazette 2003/07)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (71) Applicants: Wafermasters, Incorporated San Jose, CA 95112 (US) TOKYO ELECTRON LIMITED Minato-ku,Tokyo 107-8481 (JP)	(72) Inventors: KURIBAYASHI, Hiromitsu Sagamihara City, Kanagawa 229-0016 (JP) YOO, Woo, Sik Palo Alto, CA 94303 (US) (74) Representative: Freeman, Jacqueline Carol  W.P. THOMPSON & CO.55 Drury Lane London WC2B 5SQ London WC2B 5SQ (GB)