Method of producing member with periodical structure finer than wavelength and optical element formed of the member

(19)

(11)

EP 1 338 903 A3

(12)	EUROPEAN PATENT APPLICATION

(88)	Date of publication A3:
	07.01.2004 Bulletin 2004/02

(43)	Date of publication A2:
	27.08.2003 Bulletin 2003/35

(21)	Application number: 03003919.2

(22)	Date of filing: 21.02.2003

(51)	International Patent Classification (IPC)⁷: G02B 5/28, C03B 13/10, C03B 23/203, G02B 5/30, G02B 5/18

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
	Designated Extension States:
	AL LT LV MK RO

(30)

Priority:

25.02.2002 JP 2002048036

(71)	Applicant: CANON KABUSHIKI KAISHA
	Ohta-ku, Tokyo (JP)

(72)	Inventor:
	Sakamoto, Junichi Tokyo (JP)

(74)	Representative: Weser, Wolfgang, Dr. Dipl.-Phys.
	Weser & Kollegen, Patentanwälte, Radeckestrasse 43 81245 München 81245 München (DE)

(54)	Method of producing member with periodical structure finer than wavelength and optical element formed of the member

(57) There is provided a method of producing a member of a periodic structure having a plurality of high refractive index layers and a plurality of low refractive index layers having a refractive index lower than a refractive index of the high refractive index layers alternately stacked, each of the high refractive index layer and low refractive index layer having a thickness finer than a wavelength, and the method comprises the steps of: alternately superimposing a plurality of first sheet glasses having a high refractive index and a plurality of second sheet glasses having a refractive index lower than a refractive index of the first sheet glasses on each other to form a stacked member; heating the stacked member to a temperature of not less than a glass transition temperature; and applying a pressure to the heated stacked member perpendicularly to a principal surface of the sheet glasses or extending the heated stacked member parallel to the principal surface of the sheet glasses, thereby integrating the stacked member while reducing the thickness of each of the sheet glasses. Thus, by forming an artificially controlled fine structure, a base bulk material for forming an optical element having an optional refractive index distribution or optical anisotropy can be produced.

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