WAFER CARRIER WITH STACKING ADAPTOR PLATE - Patent 1339622

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(11)

EP 1 339 622 A2

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(88)	Date of publication A3:
	17.10.2002

(43)	Date of publication:
	03.09.2003 Bulletin 2003/36

(21)	Application number: 01986506.2

(22)	Date of filing: 04.12.2001

(51)	International Patent Classification (IPC)⁷: B65D 85/00, B65D 85/30, B65D 85/48, B65G 49/07

(86)	International application number:
	PCT/US0146/538

(87)	International publication number:
	WO 0204/7118 (13.06.2002 Gazette 2002/24)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

04.12.2000 US 251025 P

(71)	Applicant: Entegris, Inc.
	Chaska, MN 55318 (US)

(72)	Inventor:
	GLYNN, Phil Colorado Springs, CO 80911 (US)

(74)	Representative: Geyer, Werner, Dr.-Ing. et al
	PatentanwälteGeyer, Fehners & PartnerPerhamerstrasse 31 80687 München 80687 München (DE)

(54)	WAFER CARRIER WITH STACKING ADAPTOR PLATE