(19)
(11) EP 1 340 064 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
09.05.2007 Bulletin 2007/19

(45) Mention of the grant of the patent:
14.03.2007 Bulletin 2007/11

(21) Application number: 01978410.7

(22) Date of filing: 12.10.2001
(51) International Patent Classification (IPC): 
G01N 21/47(2006.01)
 G01J 4/04(2006.01)
(86) International application number:
PCT/EP2001/011841
(87) International publication number:
WO 2002/046723 (13.06.2002 Gazette 2002/24)

(54)

APPARATUS AND METHOD FOR DETECTING AN AMOUNT OF DEPOLARIZATION OF A LINEARLY POLARIZED BEAM

VORRICHTUNG UND VERFAHREN ZUR ERFASSUNG EINES VERRINGERTEN POLARISATIONSGRADS EINES LINEAR POLARISIERTEN LICHTSTRAHLS

APPAREIL ET PROCEDE DE DETECTION D'UNE QUANTITE DE DEPOLARISATION D'UN FAISCEAU LINEAIREMENT POLARISE

(84) Designated Contracting States:
DE FR GB IE IT

(30) Priority: 07.12.2000 EP 00126888

(43) Date of publication of application:
03.09.2003 Bulletin 2003/36

(73) Proprietor: Qimonda Dresden GmbH & Co. oHG
01099 Dresden (DE)

(72) Inventor:
  • KUERNER, Wolfgang
    01471 Radeburg (DE)

(74) Representative: Epping - Hermann - Fischer 
Ridlerstrasse 55
80339 München
80339 München (DE)


(56) References cited: : 
EP-A- 0 321 836
WO-A-98/25131
US-A- 5 835 220
 EP-A- 0 838 679
US-A- 5 365 067
US-A- 5 936 726
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).