(19)
(11) EP 1 340 262 A2

(12)

(88) Date of publication A3:
19.09.2002

(43) Date of publication:
03.09.2003 Bulletin 2003/36

(21) Application number: 01997848.5

(22) Date of filing: 19.11.2001
(51) International Patent Classification (IPC)7H01L 27/112, H01L 21/8246
(86) International application number:
PCT/EP0113/467
(87) International publication number:
WO 0204/3152 (30.05.2002 Gazette 2002/22)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 27.11.2000 US 723413

(71) Applicant: Koninklijke Philips Electronics N.V.
5621 BA Eindhoven (NL)

(72) Inventor:
  • KHOURY, Elie, G.
    NL-5656 AA Eindhoven (NL)

(74) Representative: Peters, Carl Heinrich, Dipl.-Ing. 
Philips Intellectual Property & Standards GmbH,Postfach 50 04 42
52088 Aachen
52088 Aachen (DE)

   


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