(19)
(11) EP 1 341 643 A2

(12)

(88) Date of publication A3:
05.06.2003

(43) Date of publication:
10.09.2003 Bulletin 2003/37

(21) Application number: 01274075.9

(22) Date of filing: 20.11.2001
(51) International Patent Classification (IPC)7B24B 1/00
(86) International application number:
PCT/US0143/208
(87) International publication number:
WO 0210/0593 (19.12.2002 Gazette 2002/51)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 20.11.2000 US 715184

(71) Applicants:
  • International Business Machines Corporation
    Yorktown Heights, NY 10598 (US)
  • Freudenberg Nonwovens, L.P.
    Lowell, MA 01852 (US)

(72) Inventors:
  • CHEN, Shyng-Tsong,
    Patterson, NY 12563 (US)
  • RODBELL, Kenneth P.,
    Sandy Hook, CT 06482 (US)
  • HSU, Oscar Kai Chi.,
    Chelmsford, MA 01824 (US)
  • VANGSNESS, Jean
    Stow, MA 01775 (US)
  • GILBRIDE, David S.,
    Lowell, MA 01852 (US)
  • BILLINGS, Scott Clayton,
    Kingston, NH 03848 (US)
  • DAVIS, Kenneth.,
    Newburgh, NY 12550 (US)

(74) Representative: Kierdorf, Theodor, Dipl.-Ing. 
Frankenforster Strasse 135-137
51427 Bergisch Gladbach
51427 Bergisch Gladbach (DE)

   


(54) POLISHING PADS WITH POLYMER FILLED FIBROUS WEB, AND METHODS FOR FABRICATING AND USING SAME