(19)

(11)

EP 1 346 409 A2

(12)

(88) Date of publication A3: 19.06.2003 (43) Date of publication: 24.09.2003 Bulletin 2003/39 (21) Application number: 01992402.6 (22) Date of filing: 27.10.2001

(51) International Patent Classification (IPC)7: H01L 23/10 (86) International application number: PCT/US0150/536 (87) International publication number: WO 0205/4488 (11.07.2002 Gazette 2002/28)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 29.12.2000 US 751214 (71) Applicant: INTEL CORPORATION Santa Clara, CA 95052 (US)	(72) Inventors: SUR, Biswajit San Jose, CA 95119 (US) NEOGI, Sudipto San Jose, CA 95129 (US) RUMER, Christopher Chandler, AZ 85248 (US) TAN, Boon, Seng Butterworth,Penang 13400 (MY) (74) Representative: Molyneaux, Martyn William  Wildman, Harrold, Allen & Dixon11th Floor, Tower 3,Clements Inn, London WC2A 2AZ London WC2A 2AZ (GB)