(19)
(11) EP 1 347 804 A1

(12)

(43) Date of publication:
01.10.2003 Bulletin 2003/40

(21) Application number: 01944435.5

(22) Date of filing: 12.06.2001
(51) International Patent Classification (IPC)7A61N 5/00, H01J 7/24
(86) International application number:
PCT/US0118/822
(87) International publication number:
WO 0204/3803 (06.06.2002 Gazette 2002/23)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 30.11.2000 US 250080 P
13.12.2000 US 736097
13.12.2000 WO PCT/US00/33786
19.12.2000 US 257322 P
07.02.2001 US 267260 P

(71) Applicant: Semequip, Inc.
Billerica, Massachusetts, 01862 (US)

(72) Inventors:
  • HORSKY, Thomas, N.
    Boxborough, MA 01719 (US)
  • COHEN, Brian, C.
    San Clemente, CA 92672 (US)
  • KRULL, Wade, A.
    Marblehead, MA 01945 (US)
  • SACCO, George, P., Jr.
    Wakefield, MA 01880 (US)

(74) Representative: Paustian, Othmar, Dr.-Ing 
c/o Lieck & Partner, Widenmayerstrasse 36
80538 München
80538 München (DE)

   


(54) ION IMPLANTATION SYSTEM AND CONTROL METHOD