(19)
(11) EP 1 348 231 A2

(12)

(88) Date of publication A3:
06.02.2003

(43) Date of publication:
01.10.2003 Bulletin 2003/40

(21) Application number: 01981781.6

(22) Date of filing: 18.10.2001
(51) International Patent Classification (IPC)7: H01L 21/20
(86) International application number:
PCT/US0132/597
(87) International publication number:
WO 0204/5140 (06.06.2002 Gazette 2002/23)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 22.11.2000 US 721566

(71) Applicant: MOTOROLA, INC.
Schaumburg, IL 60196 (US)

(72) Inventors:
  • RAMDANI, Jamal
    Chandler, AZ 85248 (US)
  • HILT, Lyndee, L.
    Chandler, AZ 85226 (US)
  • DEMKOV, Alexander, A.
    Phoenix, AZ 85028 (US)

(74) Representative: McCormack, Derek James 
Motorola, European Intellectual Property Section, Law Department, Midpoint, Alencon Link
Basingstoke, Hampshire RG21 7PL
Basingstoke, Hampshire RG21 7PL (GB)

   


(54) SEMICONDUCTOR STRUCTURES HAVING A COMPLIANT SUBSTRATE