(19)

(11)

EP 1 349 704 A1

(12)

(43) Date of publication: 08.10.2003 Bulletin 2003/41 (21) Application number: 01992420.8 (22) Date of filing: 21.12.2001

(51) International Patent Classification (IPC)7: B24B 37/04, B24B 21/04 (86) International application number: PCT/US0150/625 (87) International publication number: WO 0204/9805 (27.06.2002 Gazette 2002/26)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 21.12.2000 US 747844 21.12.2000 US 747745 (71) Applicant: LAM RESEARCH CORPORATION Fremont, CA 94538 (US)	(72) Inventors: KISTLER, Rod Los Gatos, CA 95032 (US) BOYD, John Atascadero, CA 934422 (US) OWCZARZ, Alek San Jose, CA 95135 (US) (74) Representative: Thomson, Paul Anthony  Potts, Kerr & Co.,15, Hamilton Square Birkenhead,Merseyside CH41 6BR Birkenhead,Merseyside CH41 6BR (GB)