(19)
(11) EP 1 350 260 A1

(12)

(43) Date of publication:
08.10.2003 Bulletin 2003/41

(21) Application number: 02710094.0

(22) Date of filing: 14.01.2002
(51) International Patent Classification (IPC)7H01J 37/32
(86) International application number:
PCT/GB0200/115
(87) International publication number:
WO 0205/6333 (18.07.2002 Gazette 2002/29)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 13.01.2001 GB 0100958

(71) Applicant: SURFACE TECHNOLOGY SYSTEMS PLC
NewportGwent NP10 8UJ (GB)

(72) Inventors:
  • LEA, Leslie, Michael
    East Hagbourne,Didcot,Oxon OX11 9JH (GB)
  • HOPKINS, Janet
    Chepstow,Monmouthshire NP16 6DP (GB)
  • BHARDWAJ, Jyoti, Kiron
    Cupertino, CA 95014 (US)
  • ASHRAF, Huma
    Newport NP9 4LT (GB)

(74) Representative: James, Michael John Gwynne et al
Wynne-Jones, Lainé & James22, Rodney Road
CheltenhamGloucestershire GL50 1JJ
CheltenhamGloucestershire GL50 1JJ (GB)

   


(54) PLASMA PROCESSING APPARATUS