(19)
(11) EP 1 352 105 A2

(12)

(88) Date of publication A3:
03.01.2003

(43) Date of publication:
15.10.2003 Bulletin 2003/42

(21) Application number: 02719697.1

(22) Date of filing: 14.01.2002
(51) International Patent Classification (IPC)7: C23C 14/34, H01J 37/34, C23C 14/08
(86) International application number:
PCT/EP0200/378
(87) International publication number:
WO 0205/7508 (25.07.2002 Gazette 2002/30)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 17.01.2001 US 262878 P

(71) Applicant: N.V. BEKAERT S.A.
8550 Zwevegem (BE)

(72) Inventors:
  • HARTIG, Klaus
    Avcoa,Wisconsin, WI 53506 (US)
  • KRISKO, Annette, J.
    Prairie Du Sac,Wisconsin, WI 53578 (US)

   


(54) PHOTOCATALYTIC SPUTTERING TARGETS AND METHODS FOR THE PRODUCTION AND USE THEREOF