| (84) |
Designated Contracting States: |
|
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
23.10.2000 US 695577
08.03.2001 US 803080
|
| (71) |
Applicant: Applied Materials, Inc. |
|
Santa Clara,California 95052 (US) |
|
| (72) |
Inventors: |
|
- SUI, Zhifeng
Fremont, CA 94539 (US)
- SHAN, Hongqing
Cupertino, CA 95014 (US)
- JOHANSSON, Nils
Los Gatos, CA 95032 (US)
- NOORBAKHSH, Hamid
Fremont, CA 94539 (US)
- GUAN, Yu
San Jose, CA 95123 (US)
- FRUM, Coriolan
Los Gatos, CA 95033 (US)
- YUAN, Jie
San Jose, CA 95131 (US)
- HSIEH, Chang-Lin
San Jose, CA 95129 (US)
|
| (74) |
Representative: Bayliss, Geoffrey Cyril et al |
|
BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB) |
|
