TIME BASED MASS FLOW CONTROLLER AND METHOD FOR CONTROLLING FLOW RATE USING IT - Patent 1354180

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EP 1 354 180 A1

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(43)	Date of publication:
	22.10.2003 Bulletin 2003/43

(21)	Application number: 01272934.9

(22)	Date of filing: 22.11.2001

(51)	International Patent Classification (IPC)⁷: G01F 1/68

(86)	International application number:
	PCT/KR0102/016

(87)	International publication number:
	WO 0205/4020 (11.07.2002 Gazette 2002/28)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

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Priority:

28.12.2000 KR 2000084326
11.07.2001 KR 2001041670
29.08.2001 KR 2001052398

(71)	Applicant: Ses Tech Co., Ltd
	330-860 Chunan-SI,Choongchungnam-Do (KR)

(72)	Inventor:
	CHANG, Young-Chul 330-090 CHUNAN-SI,CHOONGCHUNGNAM-DO (KR)

(74)	Representative: Dempster, Benjamin John Naftel et al
	Withers & Rogers,Goldings House,2 Hays Lane London SE1 2HW London SE1 2HW (GB)

(54)	TIME BASED MASS FLOW CONTROLLER AND METHOD FOR CONTROLLING FLOW RATE USING IT