PLANARIZERS FOR SPIN ETCH PLANARIZATION OF ELECTRONIC COMPONENTS AND METHODS OF USE THEREOF - Patent 1354355

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EP 1 354 355 A1

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(43)	Date of publication:
	22.10.2003 Bulletin 2003/43

(21)	Application number: 02704222.5

(22)	Date of filing: 22.01.2002

(51)	International Patent Classification (IPC)⁷: H01L 23/48

(86)	International application number:
	PCT/US0201/861

(87)	International publication number:
	WO 0205/9966 (01.08.2002 Gazette 2002/31)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

23.01.2001 US 768439
01.05.2001 US 847766

(71)	Applicant: Honeywell International, Inc.
	Morristown, New Jersey 07962 (US)

(72)	Inventors:
	MUKHERJEE, Shyama,Honeywell International Inc. Morristown, NJ 07962 (US) LEVERT, Joseph,Honeywell International Inc. Morristown, NJ 07962 (US) DEBEAR, Donald,Honeywell International Inc. Morristown, NJ 07962 (US)

(74)	Representative: Hucker, Charlotte Jane
	Gill Jennings & EveryBroadgate House,7 Eldon Street London EC2M 7LH London EC2M 7LH (GB)

(54)	PLANARIZERS FOR SPIN ETCH PLANARIZATION OF ELECTRONIC COMPONENTS AND METHODS OF USE THEREOF