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Designated Contracting States: |
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AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
(30) |
Priority: |
21.06.2000 US 215727 P 27.10.2000 US 243976 P
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(71) |
Applicants: |
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- Hitachi Chemical Co., Ltd.
Shinjuku-ku,Tokyo 163-0490 (JP)
- HITACHI CHEMICAL RESEARCH CENTER, INC.
Irvine, CA 92715 (US)
- Hitachi, Ltd.
Chiyoda-ku,Tokyo 101-0062 (JP)
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(72) |
Inventors: |
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- MITSUHASHI, Masato
Irvine, CA 92714 (US)
- KAMBARA, Hideki
Hachioji-shi, Tokyo 192-0913 (JP)
- MATSUNAGA, Hiroko
Ames, IA 50014 (US)
- KAWAMURA, Masafumi
Shinjuku-ku, Tokyo 161-0032 (JP)
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(74) |
Representative: VOSSIUS & PARTNER |
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Siebertstrasse 4 81675 München 81675 München (DE) |
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