| (84) |
Designated Contracting States: |
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AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
| (30) |
Priority: |
20.02.2001 JP 2001043777
|
| (71) |
Applicant: EBARA CORPORATION |
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Ohta-ku,Tokyo 144-8510 (JP) |
|
| (72) |
Inventors: |
|
- HIROKAWA, Kazuto;c/o Ebara Corporation
Tokyo 144-8510 (JP)
- KODERA, Akira;c/o Ebara Research Co., Ltd.
Fujisawa-shi,Kanagawa 251-8502 (JP)
- HIYAMA, Hirokuni;c/o Ebara Research Co., Ltd.
Fujisawa-shi,Kanagawa 251-8502 (JP)
|
| (74) |
Representative: Wagner, Karl H., Dipl.-Ing. |
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WAGNER & GEYERPatentanwälteGewürzmühlstrasse 5
80538 München
80538 München (DE) |
|
