(19)
(11) EP 1 364 254 A2

(12)

(88) Date of publication A3:
12.09.2003

(43) Date of publication:
26.11.2003 Bulletin 2003/48

(21) Application number: 01995153.2

(22) Date of filing: 21.11.2001
(51) International Patent Classification (IPC)7G03F 7/09, G03F 7/004
(86) International application number:
PCT/US0143/437
(87) International publication number:
WO 0204/4816 (06.06.2002 Gazette 2002/23)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 29.11.2000 US 253980 P

(71) Applicant: E.I. DU PONT DE NEMOURS AND COMPANY
WilmingtonDelaware 19898 (US)

(72) Inventors:
  • BERGER, Larry, L.
    Chadds Ford, PA 19317 (US)
  • CRAWFORD, Michael, Karl
    Glen Mills, PA 19342 (US)
  • FRENCH, Roger, Harquail
    Wilmington, DE 19803 (US)
  • WHELAND, Robert, Clayton
    Wilmington, DE 19807 (US)
  • ZUMSTEG, Frederick, Claus, Jr.
    Wilmington, DE 19810 (US)

(74) Representative: Towler, Philip Dean 
Frank B. Dehn & Co.,European Patent Attorneys,179 Queen Victoria Street
London EC4V 4EL
London EC4V 4EL (GB)

   


(54) ANTIREFLECTIVE LAYER FOR USE IN MICROLITHOGRAPHY