(19)
(11) EP 1 364 385 A2

(12)

(88) Date of publication A3:
18.09.2003

(43) Date of publication:
26.11.2003 Bulletin 2003/48

(21) Application number: 01996878.3

(22) Date of filing: 13.11.2001
(51) International Patent Classification (IPC)7H01J 37/34
(86) International application number:
PCT/NL0100/821
(87) International publication number:
WO 0204/1356 (23.05.2002 Gazette 2002/21)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 13.11.2000 NL 1016597

(71) Applicant: OTB Group B.V.
5657 EB Eindhoven (NL)

(72) Inventors:
  • LANDSBERGEN, Jeroen, Franciscus, Maria
    5684 BN Best (NL)
  • VYSKOCIL, Jiri
    Praag 5 (CZ)

(74) Representative: Prins, Adrianus Willem et al
Vereenigde,Nieuwe Parklaan 97
2587 BN Den Haag
2587 BN Den Haag (NL)

   


(54) SPUTTER CATHODE WITH MAGNETIC SHUNT