RELAXED SILICON GERMANIUM PLATFORM FOR HIGH SPEED CMOS ELECTRONICS AND HIGH SPEED ANALOG CIRCUITS - Patent 1364411

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EP 1 364 411 A1

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(43)	Date of publication:
	26.11.2003 Bulletin 2003/48

(21)	Application number: 02709406.9

(22)	Date of filing: 07.02.2002

(51)	International Patent Classification (IPC)⁷: H01L 29/80, H01L 29/10, H01L 21/336, H01L 29/778, H01L 21/20

(86)	International application number:
	PCT/US0203/681

(87)	International publication number:
	WO 0207/1495 (12.09.2002 Gazette 2002/37)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

02.03.2001 US 273112 P
16.07.2001 US 906551
16.07.2001 US 906545

(71)	Applicant: Amberwave Systems Corporation
	Salem, NH 03079 (US)

(72)	Inventor:
	FITZGERALD, Eugene, A. Windham, NH 03087 (US)

(74)	Representative: Atkinson, Jonathan David Mark
	Urquhart-Dykes & LordTower HouseMerrion Way Leeds LS2 8PA Leeds LS2 8PA (GB)

(54)	RELAXED SILICON GERMANIUM PLATFORM FOR HIGH SPEED CMOS ELECTRONICS AND HIGH SPEED ANALOG CIRCUITS