| (84) |
Designated Contracting States: |
|
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
31.01.2001 US 265556 P
09.03.2001 US 803382
|
| (71) |
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. |
|
Portland, OR 97229-5497 (US) |
|
| (72) |
Inventors: |
|
- BAIRD, Brian, W.
Oregon City, OR 97045 (US)
- WOLFE, Michael, J.
Portland, OR 97225 (US)
- HARRIS, Richard, J.
Portland, OR 97229 (US)
- FAHEY, Kevin, P.
Portland, OR 97225 (US)
- ZOU, Lian-Cheng
Portland, OR 97221 (US)
- MCNEIL, Thomas, R.
Beaverton, OR 97006 (US)
|
| (74) |
Representative: Meddle, Alan Leonard et al |
|
Forrester & BoehmertPettenkoferstrasse 20-22
80336 München
80336 München (DE) |
|
