| (84) |
Designated Contracting States: |
|
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
12.02.2001 KR 2001006653
|
| (71) |
Applicant: SE Plasma Inc. |
|
Anyang-shi,Kyungki-do 431-060 (KR) |
|
| (72) |
Inventors: |
|
- NAM, Kee-Seok
Changwon-shi,Kyungsangnam-do 641-041 (KR)
- LEE, Sang-Ro,Mugunghwa Hanyang Apt. 109-1903
Anyang-shi,Kyungki-do 431-080 (KR)
- LEE, Koo-Hyun
Changwon-shi,Kyungsangnam-do 641-550 (KR)
- RHA, Jong-Ju,Korea Inst. of Machinery & Materials
Changwon-shi,Kyungsangnam-do 641-111 (KR)
- KIM, Jong-Kuk,Korea Inst of Machinery & Materials
Changwon-shi,Kyungsangnam-do 641-111 (KR)
|
| (74) |
Representative: Goddar, Heinz J., Dr. |
|
FORRESTER & BOEHMERTPettenkoferstrasse 20-22
80336 München
80336 München (DE) |
|
