(19)
(11) EP 1 368 136 A1

(12)

(43) Date of publication:
10.12.2003 Bulletin 2003/50

(21) Application number: 02724947.3

(22) Date of filing: 14.02.2002
(51) International Patent Classification (IPC)7B08B 3/00, F26B 3/00, G03F 7/42, H01L 21/00
(86) International application number:
PCT/US0204/398
(87) International publication number:
WO 0206/6176 (29.08.2002 Gazette 2002/35)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 15.02.2001 US 269026 P
17.08.2001 US 932063
13.09.2001 US 951259
13.09.2001 US 951249
13.09.2001 US 951092
13.09.2001 US 951247

(71) Applicant: Micell Technologies, Inc.
Raleigh, NC 27613 (US)

(72) Inventors:
  • DEYOUNG, James, P.
    Durham, NC 27707 (US)
  • GROSS, Stephen, M.
    Chapel Hill, NC 27514 (US)
  • MCCLAIN, James, B.
    Raleigh, NC 27613 (US)
  • COLE, Michael, E.
    Raleigh, NC 27613 (US)
  • BRAINARD, David, E.
    Wake Forest, NC 27587 (US)
  • DESIMONE, Joseph, M.
    Chapel Hill, NC 27516-7710 (US)

(74) Representative: Harrison Goddard Foote 
Belgrave HallBelgrave Street
Leeds LS2 8DD
Leeds LS2 8DD (GB)

   


(54) METHODS FOR CLEANING MICROELECTRONIC STRUCTURES