(19)
(11) EP 1 368 623 A1

(12)

(43) Date of publication:
10.12.2003 Bulletin 2003/50

(21) Application number: 02701505.6

(22) Date of filing: 08.03.2002
(51) International Patent Classification (IPC)7: G01J 3/26, H01S 5/183, H01S 5/187
(86) International application number:
PCT/IB0200/682
(87) International publication number:
WO 0207/5263 (26.09.2002 Gazette 2002/39)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 15.03.2001 US 809236
15.03.2001 US 809239

(71) Applicant: ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE
1015 Lausanne (CH)

(72) Inventors:
  • KAPON, Elyahou
    CH-1018 Lausanne (CH)
  • IAKOVLEV, Vladimir
    CH-1024 Ecublens (CH)
  • SIRBU, Alexei
    CH-1024 Ecublens (CH)
  • RUDRA, Alok
    CH-18078 Blonay (CH)
  • SURUCEANU, Grigore
    CH-1024 Ecublens (CH)

(74) Representative: Saam, Christophe 
Patents & Technology Surveys SATerreaux 7Case Postale 2848
2001 Neuchâtel
2001 Neuchâtel (CH)

   


(54) A MICRO-ELECTROMECHANICALLY TUNABLE VERTICAL CAVITY PHOTONIC DEVICE AND A METHOD OF FABRICATION THEREOF