(19)
(11) EP 1 368 711 A1

(12)

(43) Date of publication:
10.12.2003 Bulletin 2003/50

(21) Application number: 01995254.8

(22) Date of filing: 28.11.2001
(51) International Patent Classification (IPC)7G03F 9/00, G21K 5/00, C03C 15/00
(86) International application number:
PCT/US0144/547
(87) International publication number:
WO 0206/9054 (06.09.2002 Gazette 2002/36)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 24.02.2001 US 271136 P

(71) Applicant: CORNING INCORPORATED
Corning, N.Y. 14831 (US)

(72) Inventors:
  • MOORE, Lisa, A.
    Corning, NY 14830 (US)
  • SMITH, Charlene, M.
    Corning, NY 14830 (US)

(74) Representative: Poole, Michael John 
Corning Communications Ltd.,Patent and Licensing Dpt.,Quantum House,Maylands Avenue
Hemel Hempstead, Herts. HP2 7DE
Hemel Hempstead, Herts. HP2 7DE (GB)

   


(54) VACUUM ULTRAVIOLET TRANSMITTING SILICON OXYFLUORIDE LITHOGRAPHY GLASS