(19)
(11)
EP 1 368 711 A1
(12)
(43)
Date of publication:
10.12.2003
Bulletin 2003/50
(21)
Application number:
01995254.8
(22)
Date of filing:
28.11.2001
(51)
International Patent Classification (IPC)
7
:
G03F
9/00
,
G21K
5/00
,
C03C
15/00
(86)
International application number:
PCT/US0144/547
(87)
International publication number:
WO 0206/9054
(
06.09.2002
Gazette 2002/36)
(84)
Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
(30)
Priority:
24.02.2001
US 271136 P
(71)
Applicant:
CORNING INCORPORATED
Corning, N.Y. 14831 (US)
(72)
Inventors:
MOORE, Lisa, A.
Corning, NY 14830 (US)
SMITH, Charlene, M.
Corning, NY 14830 (US)
(74)
Representative:
Poole, Michael John
Corning Communications Ltd.,Patent and Licensing Dpt.,Quantum House,Maylands Avenue
Hemel Hempstead, Herts. HP2 7DE
Hemel Hempstead, Herts. HP2 7DE (GB)
(54)
VACUUM ULTRAVIOLET TRANSMITTING SILICON OXYFLUORIDE LITHOGRAPHY GLASS