(19)
(11) EP 1 368 832 A2

(12)

(88) Date of publication A3:
16.10.2003

(43) Date of publication:
10.12.2003 Bulletin 2003/50

(21) Application number: 02707421.0

(22) Date of filing: 17.01.2002
(51) International Patent Classification (IPC)7H01L 23/00
(86) International application number:
PCT/US0200/506
(87) International publication number:
WO 0205/8139 (25.07.2002 Gazette 2002/30)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 19.01.2001 US 262842 P
04.12.2001 US 334939 P

(71) Applicant: Chevron U.S.A. Inc.
San Ramon, CA 94583-2324 (US)

(72) Inventors:
  • DAHL, Jeremy, E.
    Palo Alto, CA 94305 (US)
  • CARLSON, Robert, M.
    Petaluma, CA 94952 (US)
  • LIU, Shenggao
    Albany, CA 94706 (US)

(74) Representative: Nash, David Allan 
Haseltine Lake,Imperial House,15-19 Kingsway
London WC2B 6UD
London WC2B 6UD (GB)

   


(54) DIAMONDOID-CONTAINING MATERIALS IN MICROELECTRONICS