(19)

(11)

EP 1 370 708 A1

(12)

(43) Date of publication: 17.12.2003 Bulletin 2003/51 (21) Application number: 02723274.3 (22) Date of filing: 20.02.2002

(51) International Patent Classification (IPC)7: C23C 14/34 (86) International application number: PCT/US0206/146 (87) International publication number: WO 0300/0950 (03.01.2003 Gazette 2003/01)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 20.02.2001 US 270211 P (71) Applicant: Honeywell International, Inc. Morristown, New Jersey 07962 (US)	(72) Inventor: LEE, Eal,Honeywell International Inc. Morristown, NJ 07962 (US) (74) Representative: Hucker, Charlotte Jane  Gill Jennings & EveryBroadgate House,7 Eldon Street London EC2M 7LH London EC2M 7LH (GB)