(19)
(11) EP 1 371 117 A2

(12)

(88) Date of publication A3:
21.11.2002

(43) Date of publication:
17.12.2003 Bulletin 2003/51

(21) Application number: 02728380.3

(22) Date of filing: 01.03.2002
(51) International Patent Classification (IPC)7H01S 3/08
(86) International application number:
PCT/US0206/235
(87) International publication number:
WO 0207/1555 (12.09.2002 Gazette 2002/37)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 02.03.2001 US 272814 P

(71) Applicant: CORNING INCORPORATED
Corning, N.Y. 14831 (US)

(72) Inventors:
  • PELL, Michael A
    Singapore 138676 (SG)
  • SMITH, Charlene M
    Corning, NY 14830 (US)
  • THEN, Paul M
    Corning, NY 14830 (US)
  • SPARROW, Robert W.
    Sturbridge, MA 01566 (US)

(74) Representative: Poole, Michael John 
Corning LimitedPatents & Licensing DepartmentQuantum House,Maylands Avenue
Hemel Hempstead, Herts. HP2 7DE
Hemel Hempstead, Herts. HP2 7DE (GB)

   


(54) HIGH REPETITION RATE EXCIMER LASER SYSTEM