(19)
(11) EP 1 373 331 A2

(12)

(88) Date of publication A3:
21.11.2002

(43) Date of publication:
02.01.2004 Bulletin 2004/01

(21) Application number: 02733834.2

(22) Date of filing: 07.03.2002
(51) International Patent Classification (IPC)7C08F 8/32, C08F 36/20, C08F 236/20, C08L 45/00, B32B 27/06, G03C 1/93
(86) International application number:
PCT/US2002/007136
(87) International publication number:
WO 2002/073307 (19.09.2002 Gazette 2002/38)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 13.03.2001 US 275528 P

(71) Applicant: Arch Specialty Chemicals, Inc.
Norwalk, Connecticut 06856-4500 (US)

(72) Inventors:
  • BINOD, B., De
    Providence, RI 03904 (US)
  • MALIK, Sanjay
    Attleboro, MA 02703 (US)
  • SPAZIANO, Gregory, Dominic
    Providence, RI 02909 (US)
  • BIAFORE, John, Joseph
    Providence, RI 02907 (US)
  • FOSTER, Patrick
    Providence, RI 02903 (US)
  • SLATER, Sidney, George
    Cumberland, RI 02864 (US)
  • STEINHAUSLER, Thomas
    Cumberland, RI 02864 (US)
  • BLAKENEY, Andrew, J.
    Seekonk, MA 02771 (US)

(74) Representative: Bannerman, David Gardner et al
Withers & Rogers,Goldings House,2 Hays Lane
London SE1 2HW
London SE1 2HW (GB)

   


(54) THERMALLY CURED UNDERLAYER FOR LITHOGRAPHIC APPLICATION