(19)

(11)

EP 1 374 282 A1

(12)

(43) Date of publication: 02.01.2004 Bulletin 2004/01 (21) Application number: 01913110.1 (22) Date of filing: 27.02.2001

(51) International Patent Classification (IPC)7: H01L 21/00, H01L 21/44, H01L 21/311, H01L 21/302 (86) International application number: PCT/US2001/006279 (87) International publication number: WO 2002/069376 (06.09.2002 Gazette 2002/36)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR (71) Applicant: CBL Technologies Redwood City, CA 94061 (US)	(72) Inventors: SOLOMON, Glenn, S. Redwood City, CA 94061 (US) MILLER, David, J. Belmont, CA 94002 (US) (74) Representative: Brophy, David et al F.R. Kelly & Co.27 Clyde RoadBallsbridge Dublin 4 Dublin 4 (IE)