A UNITARY FLEXIBLE AND MECHANICALLY AND CHEMICALLY ROBUST MICROSYSTEM AND A METHOD FOR PRODUCING SAME - Patent 1377517

(19)

(11)

EP 1 377 517 A1

(12)

(43)	Date of publication:
	07.01.2004 Bulletin 2004/02

(21)	Application number: 02719681.5

(22)	Date of filing: 27.03.2002

(51)	International Patent Classification (IPC)⁷: B81B 3/00, B81B 7/00, G02B 6/42, B01L 3/00

(86)	International application number:
	PCT/DK2002/000214

(87)	International publication number:
	WO 2002/076879 (03.10.2002 Gazette 2002/40)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

(30)

Priority:

27.03.2001 EP 01610035

(71)	Applicant: Danish Electronics Light & Acoustics (Delta)
	2970 Horsholm (DK)

(72)	Inventors:
	LISBY, Torben DK-2400 Copenhagen NV (DK) BRANEBJERG, Jens, A. DK-2970 H rsholm (DK)

(74)	Representative: Nielsen, Henrik Sten et al
	Budde, Schou & Ostenfeld A/SVester Sögade 10 1601 Copenhagen V 1601 Copenhagen V (DK)

(54)	A UNITARY FLEXIBLE AND MECHANICALLY AND CHEMICALLY ROBUST MICROSYSTEM AND A METHOD FOR PRODUCING SAME