METHOD OF DETECTING CARRIER DOSE OF A SEMICONDUCTOR WAFER - Patent 1377842

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EP 1 377 842 A1

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(43)	Date of publication:
	07.01.2004 Bulletin 2004/02

(21)	Application number: 02721475.8

(22)	Date of filing: 19.03.2002

(51)	International Patent Classification (IPC)⁷: G01R 31/02

(86)	International application number:
	PCT/US2002/008418

(87)	International publication number:
	WO 2002/077654 (03.10.2002 Gazette 2002/40)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

23.03.2001 US 278548 P

(71)	Applicant: Solid State Measurements, Inc.
	Pittsburgh, PA 15275 (US)

(72)	Inventors:
	HOWLAND, William, H. Wexford, PA 15090 (US) HILLARD, Robert, J. Avalon, PA 15202 (US)

(74)	Representative: van Westenbrugge, Andries
	Nederlandsch OctrooibureauScheveningseweg 82P.O. Box 29720 2502 LS Den Haag 2502 LS Den Haag (NL)

(54)	METHOD OF DETECTING CARRIER DOSE OF A SEMICONDUCTOR WAFER