(19)
(11) EP 1 378 002 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
18.04.2007 Bulletin 2007/16

(45) Mention of the grant of the patent:
28.02.2007 Bulletin 2007/09

(21) Application number: 02718080.1

(22) Date of filing: 16.01.2002
(51) International Patent Classification (IPC): 
H01L 21/02(2006.01)
H01L 23/522(2006.01)
 H01L 21/768(2006.01)
(86) International application number:
PCT/EP2002/001049
(87) International publication number:
WO 2002/058117 (25.07.2002 Gazette 2002/30)

(54)

METAL-INSULATOR-METAL CAPACITOR IN COPPER

METALL-ISOLATOR-METALL-KONDENSATOR UNTER VERWENDUNG VON KUPFER

CONDENSATEUR METAL-ISOLANT-METAL REALISE SELON LA TECHNOLOGIE DU CUIVRE

(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU NL PT SE TR

(30) Priority: 17.01.2001 US 764832

(43) Date of publication of application:
07.01.2004 Bulletin 2004/02

(73) Proprietors:
  • International Business Machines Corporation
    Armonk, N.Y. 10504 (US)
    Designated Contracting States:
    AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU NL PT SE TR 
  • Infineon Technologies North America Corp.
    San Jose, CA 95112 (US)
    Designated Contracting States:
    AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU NL PT SE TR 

(72) Inventors:
  • ARMACOST, Michael, D.
    San Jose, CA 95120 (US)
  • AUGUSTIN, Andreas, K.
    80469 Munich (DE)
  • FRIESE, Gerald, R.
    Fishkill, NY 12524 (US)
  • HEIDENREICH, John, E., III
    Yorktown Heights, NY 10598 (US)
  • HUECKEL, Gary, R.
    Putnam Valley, NY 10579 (US)
  • STEIN, Kenneth, J.
    Sandy Hook, CT 06482 (US)

(74) Representative: Therias, Philippe et al
Compagnie IBM France Direction de Propriété Intellectuelle Le Plan-du-Bois
06610 La Gaude
06610 La Gaude (FR)


(56) References cited: : 
EP-A- 0 800 217
US-A- 5 933 719
 WO-A-00/46844
US-A1- 2001 026 003
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).