METHODS FOR IMPROVED PLANARIZATION POST CMP PROCESSING - Patent 1378005

(19)

(11)

EP 1 378 005 A2

(12)

(88)	Date of publication A3:
	17.04.2003

(43)	Date of publication:
	07.01.2004 Bulletin 2004/02

(21)	Application number: 02703086.5

(22)	Date of filing: 08.01.2002

(51)	International Patent Classification (IPC)⁷: H01L 21/302, H01L 21/461

(86)	International application number:
	PCT/US2002/000460

(87)	International publication number:
	WO 2002/056343 (18.07.2002 Gazette 2002/29)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

(30)

Priority:

09.01.2001 US 757879

(71)	Applicant: Honeywell International Inc.
	Morristown, New Jersey 07960 (US)

(72)	Inventor:
	HANSON, Eric, Ian Maple Grove, MN 55369 (US)

(74)	Representative: Hucker, Charlotte Jane
	Gill Jennings & EveryBroadgate House,7 Eldon Street London EC2M 7LH London EC2M 7LH (GB)

(54)	METHODS FOR IMPROVED PLANARIZATION POST CMP PROCESSING