| (84) |
Designated Contracting States: |
|
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
20.04.2001 JP 2001122859
27.06.2001 JP 2001195269
|
| (71) |
Applicant: Ebara Corporation |
|
Tokyo 144-8510 (JP) |
|
| (72) |
Inventors: |
|
- ISHIKAWA, Ryuichi,c/o Ebara Corporation
Ohta-ku,Tokyo 144-8510 (JP)
- ENDO, Hidekazu,c/o Ebara Corporation
Ohta-ku,Tokyo 144-8510 (JP)
- CHO, Hiromitsu,c/o Ebara Corporation
Ohta-ku,Tokyo 144-8510 (JP)
|
| (74) |
Representative: Wagner, Karl H., Dipl.-Ing. et al |
|
WAGNER & GEYERPatentanwälteGewürzmühlstrasse 5
80538 München
80538 München (DE) |
|
