(19)
(11) EP 1 381 708 A1

(12)

(43) Date of publication:
21.01.2004 Bulletin 2004/04

(21) Application number: 02707811.2

(22) Date of filing: 20.02.2002
(51) International Patent Classification (IPC)7C23C 14/35, G01N 33/00
(86) International application number:
PCT/US2002/004819
(87) International publication number:
WO 2002/086186 (31.10.2002 Gazette 2002/44)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 24.04.2001 US 286182 P
06.06.2001 US 296354 P
21.06.2001 US 300019 P
11.10.2001 US 328847 P

(71) Applicant: TOSOH SMD, INC.
Grove City,Ohio 43123 (US)

(72) Inventors:
  • IVANOV, Eugene, Y.
    Grove City, OH 43123 (US)
  • SMATHERS, David, B.
    Columbus, OH 43221 (US)
  • WICKERSHAM, Charles, E., Jr.
    Columbus, OH 43221 (US)
  • ZHU, Lin
    Grove City, OH 43123 (US)

(74) Representative: Johnstone, Douglas Ian et al
Baron & Warren,19 South End
Kensington,London W8 5BU
Kensington,London W8 5BU (GB)

   


(54) TARGET AND METHOD OF OPTIMIZING TARGET PROFILE