| (84) |
Designated Contracting States: |
|
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
Designated Extension States: |
|
AL LT LV MK RO SI |
| (30) |
Priority: |
19.04.2001 JP 2001121385
19.04.2001 JP 2001121387
27.06.2001 JP 2001195268
|
| (71) |
Applicant: EBARA CORPORATION |
|
Ohta-ku,Tokyo 144-8510 (JP) |
|
| (72) |
Inventors: |
|
- ISHIKAWA, Ryuichi
Kawasaki-shi, Kanagawa 213-0021 (JP)
- GOKE, Chikao
Inzai-shi, Chiba 270-1315 (JP)
- HAYAKAWA, Junichi
Yokohama-shi, Kanagawa 245-0061 (JP)
- HIROSE, Tetsuhisa
Katsushika-ku, Tokyo 125-0062 (JP)
- NAKAJIMA, Takashi
Suginami-ku, Tokyo 168-0063 (JP)
- ICHIHARA, Osamu
Yokohama-shi, Kanagawa 236-0032 (JP)
- NAKAMURA, Yuichi
Kawasaki-shi, Kanagawa 211-0022 (JP)
|
| (74) |
Representative: Wagner, Karl H., Dipl.-Ing. et al |
|
Wagner & Geyer,Patentanwälte,Gewürzmühlstrasse 5
80538 München
80538 München (DE) |
|
