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(11)

EP 1 386 143 A1

(12)

(43) Date of publication: 04.02.2004 Bulletin 2004/06 (21) Application number: 02736656.6 (22) Date of filing: 02.05.2002

(51) International Patent Classification (IPC)7: G01N 21/956, G01R 31/309, G06T 7/00, H05K 13/08 (86) International application number: PCT/US2002/014195 (87) International publication number: WO 2002/088688 (07.11.2002 Gazette 2002/45)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 02.05.2001 US 288065 P (71) Applicant: TERADYNE, INC. Boston, Massachusetts 02118 (US)	(72) Inventors: LIPSON, Pamela, R. Cambridge, MA 02138 (US) MULLALY, William, J. Brighton, MA 02135 (US) PYE, Richard Burlington, MA 01803-2823 (US) RATAN, Aparna, L. Cambridge, MA 02140 (US) (74) Representative: Luckhurst, Anthony Henry William  MARKS & CLERK,57-60 Lincoln's Inn Fields London WC2A 3LS London WC2A 3LS (GB)