(19)
(11) EP 1 386 347 A2

(12)

(88) Date of publication A3:
27.11.2003

(43) Date of publication:
04.02.2004 Bulletin 2004/06

(21) Application number: 02724965.5

(22) Date of filing: 20.02.2002
(51) International Patent Classification (IPC)7H01L 21/00
(86) International application number:
PCT/US2002/004824
(87) International publication number:
WO 2002/067293 (29.08.2002 Gazette 2002/35)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 20.02.2001 US 788928
13.03.2001 US 804817
13.03.2001 US 805410
25.10.2001 US 1412

(71) Applicant: Rockwell Automation Technologies, Inc.
Mayfield Heights, OH 44124 (US)

(72) Inventors:
  • ANNIS, Jeffrey, R.
    Waukesha, WI 53186 (US)
  • DUMMERMUTH, Ernst, H.
    Chesterland, OH 44026 (US)
  • HARRIS, Richard, D.
    Solon, OH 44139 (US)
  • HERBERT, Patrick, C.
    Mentor, OH 44060 (US)
  • KNIESER, Michael, J.
    Richmond Heights, OH 44143 (US)
  • KRETSCHMANN, Robert, J.
    Bay Village, OH 44140 (US)
  • LARSSON, Henric
    Oak Park, CA 91377 (US)
  • MORRIS, Winfred, L.
    Thousand Oaks, CA 91360 (US)
  • YAO, Jun, J.
    Thousand Oaks, CA 91360-6245 (US)

(74) Representative: Smith, Samuel Leonard 
J.A. Kemp & Co.,14 South Square,Gray's Inn
London WC1R 5JJ
London WC1R 5JJ (GB)

   


(54) MICROELECTROMECHANICAL SYSTEM (MENS) DEVICE