METHOD, APPARATUS AND SYSTEM FOR ELECTRO-DEPOSITION OF A PLURALITY OF THIN LAYERS ON A SUBSTRATE - Patent 1390567

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EP 1 390 567 A1

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(43)	Date of publication:
	25.02.2004 Bulletin 2004/09

(21)	Application number: 02750883.7

(22)	Date of filing: 03.05.2002

(51)	International Patent Classification (IPC)⁷: C25D 5/10, C25D 17/00

(86)	International application number:
	PCT/EP2002/004888

(87)	International publication number:
	WO 2002/092883 (21.11.2002 Gazette 2002/47)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

08.05.2001 EP 01111055

(71)	Applicant: UNIVERSITE CATHOLIQUE DE LOUVAIN
	1348 Louvain-la-Neuve (BE)

(72)	Inventors:
	MATEFI-TEMPFLI, S,c/o Univ. Catholique Louvain 1348 Louvain-La-Neuve (BE) PIRAUX, L,c/o Univ. Catholique Louvain 1348 Louvian-La-Neuve (BE)

(74)	Representative: Kirschner, Klaus Dieter, Dipl.-Phys.
	Schneiders & BehrendtRechtsanwälte - PatentanwälteSollner Strasse 38 81479 München 81479 München (DE)

(54)	METHOD, APPARATUS AND SYSTEM FOR ELECTRO-DEPOSITION OF A PLURALITY OF THIN LAYERS ON A SUBSTRATE