(19)
(11) EP 1 392 884 A1

(12)

(43) Date of publication:
03.03.2004 Bulletin 2004/10

(21) Application number: 02776556.9

(22) Date of filing: 08.05.2002
(51) International Patent Classification (IPC)7C23C 14/34, B23K 28/00, B23K 33/00
(86) International application number:
PCT/US2002/014302
(87) International publication number:
WO 2002/099157 (12.12.2002 Gazette 2002/50)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 30.05.2001 US 870164

(71) Applicant: Praxair S.T. Technology, Inc.
North Haven, CT 06473 (US)

(72) Inventors:
  • HUNT, Thomas, J.
    Peekskill, NY 10566 (US)
  • KOENIGSMANN, Holger, J.
    Congers, NY 10920 (US)
  • GILMAN, Paul, S.
    Suffern, NY 10901 (US)

(74) Representative: Schwan - Schwan - Schorer 
PatentanwälteBauerstrasse 22
80796 München
80796 München (DE)

   


(54) RECESSED SPUTTER TARGET