(19)
(11) EP 1 395 392 A1

(12)

(43) Date of publication:
10.03.2004 Bulletin 2004/11

(21) Application number: 02746526.9

(22) Date of filing: 12.06.2002
(51) International Patent Classification (IPC)7B24B 21/00
(86) International application number:
PCT/US2002/018827
(87) International publication number:
WO 2002/100594 (19.12.2002 Gazette 2002/51)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 12.06.2001 US 880730
18.04.2002 US 126464
18.04.2002 US 126469

(71) Applicant: Nutool, Inc.
Milpitas, CA 95035 (US)

(72) Inventors:
  • TALIEH, Homayoun
    San Jose, CA 95138 (US)
  • VOLODARSKY, Konstantin
    San Francisco, CA 94116 (US)
  • ASHJAEE, Jalal
    Cupertino, CA 95014 (US)
  • YOUNG, Douglas, W.
    Sunnyvale, CA 94086 (US)
  • PERLOV, Vulf
    Cupertino, CA 95014 (US)
  • VELAZQUEZ, Efrain
    Milpitas, CA 95035 (US)
  • HENDERSON, Mark
    Milpitas, CA 95035 (US)
  • FREY, Bernard, M.
    Milpitas, CA 95035 (US)

(74) Representative: Flint, Adam 
W.H. Beck, Greener & Co.,7 Stone Buildings,Lincoln's Inn
London WC2A 3SZ
London WC2A 3SZ (GB)

   


(54) IMPROVED METHOD AND APPARATUS FOR BI-DIRECTIONALLY POLISHING A WORKPIECE