(19)
(11) EP 1 396 010 A2

(12)

(88) Date of publication A3:
08.01.2004

(43) Date of publication:
10.03.2004 Bulletin 2004/11

(21) Application number: 01995964.2

(22) Date of filing: 28.11.2001
(51) International Patent Classification (IPC)7: H01L 21/00
(86) International application number:
PCT/US2001/044625
(87) International publication number:
WO 2002/045130 (06.06.2002 Gazette 2002/23)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 29.11.2000 US 725412

(71) Applicants:
  • Infineon Technologies North America Corp.
    San Jose, CA 95112-4508 (US)
  • International Business Machines Corporation
    Armonk, NY 10504 (US)

(72) Inventors:
  • GRUENING, Ulrike
    81539 Munich (DE)
  • DIVAKARUNI, Ramachandra
    Ossining, NY 10562 (US)
  • MANDELMAN, Jack
    Stormville, NY 12582 (US)
  • RUPP, Thomas
    9583 Faak am See (US)

(74) Representative: Epping Hermann & Fischer 
Ridlerstrasse 55
80339 München
80339 München (DE)

   


(54) EMBEDDED VERTICAL DRAM CELLS AND DUAL WORKFUNCTION LOGIC GATES